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Call for Paper Vol-7 Iss-02 Feb-2018

IJRET invites papers from various engineering disciplines for Volume-07 Issue-02, Feb-2018.

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Published Vol-07 Iss-01 Jan-18

IJRET Volume-07 Issue-01, Jan-2018 is published now.

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DESIGN AND SIMULATION OF HIGH SENSITIVITY MEMS CANTILEVERS

Srinivasa Rao Karumuri, Srinivas Yedlapalli, Yugandhar Garapati

Abstract: This paper presents design, analysis and simulation of MEMS based micro cantilevers of various shapes, to analyze their sensitivity. The analysis is done using FEM Tool (Comsol Multiphysics 4.3).The analytical model of Cantilevers of various shapes are analyzed and the construction process is discussed in this paper. The change in sensitivity with the change in shape is observed.

Keywords: MEMS, Cantilever, Sensitivity

DOI: https://doi.org/10.15623/ijret.2016.0517012