A NOVEL AND INNOVATIVE METHOD FOR DESIGNING OF RF MEMS DEVICES

Deepak Kumar Sinha, Sandhya Save

Abstract: The design complexity of the RF MEMS devices is increasing with fast rate, which require more accurate designing and simulation techniques. With upcoming technologies accurate simulation capability is a necessity for designing smaller chips. When devices are designed at nano scale, it presents a number of unique challenges. As the scale of the individual device decreases and the complexity of the physical structure increases, the nature of the device characteristics depart from those obtained from many of the classically held modeling concepts. Furthermore, the difficulty encountered in performing measurements on these devices means we have to put more emphasis on the results obtained from theoretical characteristics. Modeling also allows new device structures to be rigorously investigated prior to fabrication. This paper reports a novel and innovative method of design and simulation of MEMS based inductor by the method of co-simulation.

Keywords: Micro Electro Mechanical System, Radio Frequency, Co-Simulation, COMSOL Multiphysics, SOLIDWORKS, Computer Aided Design, Integrated Circuit

DOI: https://doi.org/10.15623/ijret.2016.0508039