CANTILEVER TYPE SWITCH DESIGN

Gajanan D.Patil, N. R. Kolhare, Pradip Bhosale, A.I.Rokade

Abstract: This paper deals with the RF (Radio Frequency)-MEMS (Micro-Electro-Mechanical-System) switch design using the coventorware software and its superiority over the existing technologies like PIN Diodes and Field-Effect-Transistors regarding size, power, Isolation and Insertion loss, and graphically how Pull-in voltage affects on the deflection of the switch. Also this paper deals with the fabrication process of the cantilever switch.

Keywords: Etching, Sacrificial Layer, Actuation Voltage, Electrostatic Force, RF Switch, PIN Diodes, Stiction, Isolation and Insertion loss.

DOI: https://doi.org/10.15623/ijret.2015.0401061