ANALYTICAL SOLUTIONS FOR SQUARE SHAPE PRESSURE MICROSENSORS

Sumit Kumar Jindal, Sanjeev Kumar Raghuwanshi

Abstract: Most commonly for MEMS Systems the shapes used for diaphragm are square, circular or rectangular. Here square shape is under consideration. Pressure microsensor designed is operated in linear range. All the analytical solutions are presented along with set of simple equations to calculate and predict the sensitivity of pressure micro sensors. By the use of COMSOL and simulation it can be found that analytical solutions hold good.

Keywords: Microsensors, sensitivity, Burst pressure, piezoresisive

DOI: https://doi.org/10.15623/ijret.2014.0327009